TS

Toru Shirasaki

SC Shin-Etsu Chemical Co.: 2 patents #51 of 245Top 25%
Overall (2003): #38,481 of 273,478Top 15%
2
Patents 2003

Issued Patents 2003

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6639650 Light exposure method, light exposure apparatus, pellicle and method for relieving warpage of pellicle membrane — 2003-10-28
6593034 Framed pellicle for protection of photolithographic photomask — 2003-07-15