Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6582223 | Pickup apparatus for semiconductor chips | Hiroshi Yasumura, Tadayuki Into, Yasuhiro Goto, Tatsuyuki Ishioka | 2003-06-24 |
| 6520844 | Method of thinning semiconductor wafer capable of preventing its front from being contaminated and back grinding device for semiconductor wafers | Satoru Fukunaga, Tadayuki Into | 2003-02-18 |