Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597446 | Holographic scatterometer for detection and analysis of wafer surface deposits | James Marks, Takeo Sawatari | 2003-07-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597446 | Holographic scatterometer for detection and analysis of wafer surface deposits | James Marks, Takeo Sawatari | 2003-07-22 |