Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6668844 | Systems and methods for processing workpieces | Eric Lund, Joe Lanfrankie, Gil Lund, Dana Scranton | 2003-12-30 |
| 6601594 | Apparatus and method for delivering a treatment liquid and ozone to treat the surface of a workpiece | Mignon P. Hess | 2003-08-05 |
| 6591845 | Apparatus and method for processing the surface of a workpiece with ozone | Mignon P. Hess | 2003-07-15 |
| 6582525 | Methods for processing a workpiece using steam and ozone | — | 2003-06-24 |
| 6543156 | Method and apparatus for high-pressure wafer processing and drying | Ian Sharp, Craig P. Meuchel, H. Frederick Woods | 2003-04-08 |