Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645883 | Film forming method, semiconductor device and manufacturing method of the same | Youichi Yamamoto, Hiroshi Ikakura, Tomomi Suzuki, Yoshimi Shioya, Kouichi Ohira +2 more | 2003-11-11 |
| 6642157 | Film forming method and semiconductor device | Yoshimi Shioya, Youichi Yamamoto, Tomomi Suzuki, Hiroshi Ikakura, Shoji Ohgawara +2 more | 2003-11-04 |