SM

Shinji Maekawa

SL Semiconductor Energy Laboratory: 1 patents #69 of 134Top 55%
Overall (2003): #119,976 of 273,478Top 45%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6518104 Method of manufacturing a semiconductor device by thermal oxidation of an impurity doped amorphous semiconductor film Hisashi Ohtani 2003-02-11