Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670640 | Method for producing semiconductor device | Shunpei Yamazaki, Satoshi Teramoto | 2003-12-30 |
| 6620288 | Substrate treatment apparatus | Hisato Shinohara, Masato Yonezawa | 2003-09-16 |
| 6613619 | Semiconductor device and method for producing the same | Shunpei Yamazaki, Koichiro Tanaka | 2003-09-02 |
| 6599790 | Laser-irradiation method and laser-irradiation device | Shunpei Yamazaki, Satoshi Teramoto, Takeshi Fukunaga, Setsuo Nakajima, Tadayoshi Miyamoto +1 more | 2003-07-29 |
| 6596613 | Laser annealing method | Koichiro Tanaka | 2003-07-22 |
| 6587277 | Apparatus and method for laser radiation | Shunpei Yamazaki, Satoshi Teramoto, Koichiro Tanaka | 2003-07-01 |
| 6576534 | Method for forming a semiconductor | Honyong Zhang | 2003-06-10 |
| 6562672 | Semiconductor material and method for forming the same and thin film transistor | Shunpei Yamazaki, Hongyong Zhang, Yasuhiko Takemura | 2003-05-13 |
| 6558991 | Laser irradiation apparatus and laser irradiation method | Shunpei Yamazaki, Koichiro Tanaka | 2003-05-06 |
| 6541795 | Thin film semiconductor device and production method for the same | Yasuhiko Takemura, Hisashi Ohtani | 2003-04-01 |
| 6528359 | Laser annealing method and laser annealing device | Shunpei Yamazaki, Koichiro Tanaka | 2003-03-04 |
| 6524977 | Method of laser annealing using linear beam having quasi-trapezoidal energy profile for increased depth of focus | Shunpei Yamazaki, Koichiro Tanaka | 2003-02-25 |