Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593235 | Semiconductor device with a tapered hole formed using multiple layers with different etching rates | Masahiko Hayakawa, Mitsunori Sakama, Toshimitsu Konuma, Shunpei Yamazaki | 2003-07-15 |
| 6566711 | Semiconductor device having interlayer insulating film | Shunpei Yamazaki, Akira Mase, Masaaki Hiroki, Yasuhiko Takemura, Hongyong Zhang +1 more | 2003-05-20 |
| 6507069 | Semiconductor device and method of manufacture thereof | Hongyong Zhang, Yasuhiko Takemura, Toshimitsu Konuma, Hideto Ohnuma, Naoaki Yamaguchi +1 more | 2003-01-14 |