TH

Thomas N. Horsky

AT Axcelis Technologies: 1 patents #20 of 51Top 40%
📍 Boxborough, MA: #8 of 28 inventorsTop 30%
🗺 Massachusetts: #1,861 of 6,881 inventorsTop 30%
Overall (2003): #105,212 of 273,478Top 40%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6583544 Ion source having replaceable and sputterable solid source material Tommy D. Hollingsworth 2003-06-24