Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593163 | Double-sided trench fill for electrical isolation of microelectromechanical system structures | Wayne A. Bonin, Zine-Eddine Boutaghou, Roger L. Hipwell, Jr., Barry D. Wissman, Lee Walter | 2003-07-15 |