Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649498 | Metal film protection of the surface of a structure formed on a semiconductor substrate during etching of the substrate by a KOH etchant | — | 2003-11-18 |
| 6538328 | Metal film protection of the surface of a structure formed on a semiconductor substrate during etching of the substrate by a KOH etchant | — | 2003-03-25 |