Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665575 | Recipe editor for editing and creating process recipes with parameter-level security for various kinds of semiconductor-manufacturing equipment | Manoj Betawar, Vrunda Bhagwat, Manish C. Mehta, Nitin S. Parekh | 2003-12-16 |