Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627076 | Compact microchannel system | — | 2003-09-30 |
| 6576064 | Support apparatus for semiconductor wafer processing | Robert H. Nilson, Kenneth Torres | 2003-06-10 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627076 | Compact microchannel system | — | 2003-09-30 |
| 6576064 | Support apparatus for semiconductor wafer processing | Robert H. Nilson, Kenneth Torres | 2003-06-10 |