Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669990 | Atomic layer deposition method using a novel group IV metal precursor | Dae-sig Kim, Young Jin Cho, Jung-hyun Lee | 2003-12-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669990 | Atomic layer deposition method using a novel group IV metal precursor | Dae-sig Kim, Young Jin Cho, Jung-hyun Lee | 2003-12-30 |