Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613487 | Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the same | Sang-Kap Kim | 2003-09-02 |
| 6522385 | Air shower head of photolithography equipment for directing air towards a wafer stage | Byung-Moo Lee, Hyun Joon Kim, Jai-Heung Choi | 2003-02-18 |