Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617259 | Method for fabricating semiconductor device and forming interlayer dielectric film using high-density plasma | Jong-Koo Lee | 2003-09-09 |
| 6599792 | Semiconductor device and method for manufacturing the same | — | 2003-07-29 |