Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670670 | Single electron memory device comprising quantum dots between gate electrode and single electron storage element and method for manufacturing the same | Soo Doo Chae, Byong-man Kim, Moon-kyung Kim, Hee-soon Chae | 2003-12-30 |
| 6664123 | Method for etching metal layer on a scale of nanometers | Byong-man Kim, Soo Doo Chae, Hee-soon Chae | 2003-12-16 |