Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656282 | Atomic layer deposition apparatus and process using remote plasma | Yong-Il Kim, Byung-Ha Cho | 2003-12-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656282 | Atomic layer deposition apparatus and process using remote plasma | Yong-Il Kim, Byung-Ha Cho | 2003-12-02 |