Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6658917 | Air-sampling carrier, apparatus and method for analyzing air in a semiconductor process tool | Dong-Seok Ham | 2003-12-09 |
| 6642896 | Reader coil antenna, and non-contacting type card identification system using the same | — | 2003-11-04 |
| 6598312 | Wafer drying apparatus | Dong-kwan Hong, Nung-Suck Kang | 2003-07-29 |
| 6582125 | Smart foil journal bearing with piezoelectric actuators | Yong Bok Lee, Chang-Ho Kim, Nam Soo Lee | 2003-06-24 |
| 6527446 | Foil journal bearing utilizing semi-active dampers | Yong Bok Lee, Chang-Ho Kim, Nam Soo Lee | 2003-03-04 |