Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641979 | Technique of exposing a resist using electron beams having different accelerating voltages | — | 2003-11-04 |
| 6627366 | Electron beam exposure method having good linearity with respect to producing fine patterns | — | 2003-09-30 |
| 6555275 | Technique of exposing a resist using electron beams having different accelerating voltages, and method of manufacturing a photomask using the technique | — | 2003-04-29 |