Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6571448 | Apparatus for attaching sand papers on dummy wafers | Ho-Yeol Lee, Sang-Do Lee, Joon-Su Ji | 2003-06-03 |
| 6560304 | Apparatus for reducing pattern jitter by using locally symmetry forcing wave generating unit and method using the same | Young-Bin Yoon, Yong-hoon Lee | 2003-05-06 |