Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6545491 | Apparatus for detecting defects in semiconductor devices and methods of using the same | Yang-hyong Kim, Hyo-Cheon Kang | 2003-04-08 |
| 6525318 | Methods of inspecting integrated circuit substrates using electron beams | Yang-hyong Kim, Hyo-Cheon Kang, Sang-myun Lee | 2003-02-25 |