Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667553 | H:SiOC coated substrates | Glenn A. Cerny, Mark Loboda | 2003-12-23 |
| 6593248 | Method for producing hydrogenated silicon oxycarbide films having low dielectric constant | Mark Loboda | 2003-07-15 |