Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620297 | Porous getter devices with reduced particle loss and method for manufacturing same | Marco Moraja | 2003-09-16 |
| 6589599 | Easily loaded and unloaded getter device for reducing evacuation time and contamination in a vacuum chamber and method for use of same | Francesco Mazza, Marco Moraja | 2003-07-08 |
| 6508632 | Getter system for purifying the confinement volume in process chambers | Francesco Mazza | 2003-01-21 |