Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6504618 | Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system | Andrey Vertikov | 2003-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6504618 | Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system | Andrey Vertikov | 2003-01-07 |