Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656368 | Nonstick layer for a micromechanical component | Peter Hein, Helmut Skapa, Horst Muenzel | 2003-12-02 |
| 6520017 | Micromechanical spin angular acceleration sensor | Harald Emmerich | 2003-02-18 |