Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641348 | Docking station for substrate transport containers | Klaus Schultz, Marlies Mages | 2003-11-04 |
| 6609876 | Loading and unloading station for semiconductor processing installations | Andreas Mages, Werner Scheler, Herbert Blaschitz, Heinz Schneider | 2003-08-26 |