Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617036 | Barrier layer for silicon containing substrate | John E. Holowczak | 2003-09-09 |
| 6617037 | Silicon based substrate with a CTE compatible layer on the substrate | Ellen Y. Sun | 2003-09-09 |
| 6589677 | Silicon based substrate with environmental/thermal barrier layer | Ellen Y. Sun | 2003-07-08 |