Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6546804 | Method of making a pressure sensor comprising a resonant beam structure | Edvard Kaelvesten | 2003-04-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6546804 | Method of making a pressure sensor comprising a resonant beam structure | Edvard Kaelvesten | 2003-04-15 |