Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6629465 | Miniature gauge pressure sensor using silicon fusion bonding and back etching | John Logan, Gertjan van Sprakelaar | 2003-10-07 |
| 6523560 | Microvalve with pressure equalization | Kirt Williams, Bert Pieter Van Drieënhuizen, Dominik P. Jaeggi, Edward Nelson Fuller, Richard J. Barron | 2003-02-25 |