Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596388 | Method of introducing organic and inorganic grafted compounds throughout a thermoplastic polishing pad using a supercritical fluid and applications therefor | Yaw S. Obeng | 2003-07-22 |
| 6579604 | Method of altering and preserving the surface properties of a polishing pad and specific applications therefor | Yaw S. Obeng | 2003-06-17 |
| 6575823 | Polishing pad and method for in situ delivery of chemical mechanical polishing slurry modifiers and applications thereof | Yaw S. Obeng | 2003-06-10 |