Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649018 | System for removal of photoresist using sparger | Ismail Kashkoush | 2003-11-18 |
| 6626189 | Method of processing substrates using pressurized mist generation | Ismail Kashkoush, Dennis Nemeth, Gim-Syang Chen | 2003-09-30 |
| 6532974 | Process tank with pressurized mist generation | Ismail Kashkoush, Dennis Nemeth, Gim-Syang Chen | 2003-03-18 |