Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6572705 | Method and apparatus for growing thin films | Tuomo Suntola | 2003-06-03 |
| 6534431 | Process and apparatus for preparing heterogeneous catalysts | Tuomo Suntola, Eeva-Liisa Lakomaa, Hilkka Knuuttila, Pekka Knuuttila, Outi Krause | 2003-03-18 |
| 6506352 | Method for removing substances from gases | Jaakko Hyvarinen | 2003-01-14 |