Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511895 | Semiconductor wafer turning process | Yutaka Koma, Hiroshi Haji, Tetsuhiro Iwai | 2003-01-28 |
| 6511917 | Plasma treatment apparatus and method | Hiroshi Haji | 2003-01-28 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511895 | Semiconductor wafer turning process | Yutaka Koma, Hiroshi Haji, Tetsuhiro Iwai | 2003-01-28 |
| 6511917 | Plasma treatment apparatus and method | Hiroshi Haji | 2003-01-28 |