Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610606 | Method for manufacturing nitride compound based semiconductor device using an RIE to clean a GaN-based layer | Shiro Sakai | 2003-08-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610606 | Method for manufacturing nitride compound based semiconductor device using an RIE to clean a GaN-based layer | Shiro Sakai | 2003-08-26 |