Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6600850 | MEMS optical switch with a notched latching apparatus for improved mirror positioning and method of fabrication thereof | — | 2003-07-29 |
| 6556741 | MEMS optical switch with torsional hinge and method of fabrication thereof | — | 2003-04-29 |
| 6526198 | Micromachined optomechanical switches | Ming Chieh Wu, Anis Husain | 2003-02-25 |