Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671041 | Apparatus for inspecting a substrate | Hiroyuki Okahira, Yuzo Nakamura, Nobuo Fujisaki | 2003-12-30 |
| 6580518 | Confocal microscope and height measurement method using the same | Yukio Eda, Nahoko Hisata, Yasuhiro Kamihara | 2003-06-17 |