Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6524968 | Method for forming insulating film and for manufacturing integrated circuit | Masashi Takahashi, Toshio Nagata, Yoshirou Tsurugida, Hirotaka Mori, Akihiko Ohara +4 more | 2003-02-25 |