Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605175 | Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber | Eugen Beck | 2003-08-12 |
| 6503351 | Use of a cleaning process, a cleaning process, a connection process and a workpiece pair | Alex Dommann, Christoph Benno Luechinger-Bautista, Nicolino Onda, Heinrich Zimmerman | 2003-01-07 |