Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656341 | Method of etching, as well as frame element, mask and prefabricated substrate element for use in such etching | Per Petersson, Mikael Gustavsson, Jenny Sjöberg, Bin Xie, Bjarni Bjarnason +1 more | 2003-12-02 |