Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613199 | Apparatus and method for physical vapor deposition using an open top hollow cathode magnetron | Jeffrey Tobin, Jean Lu, Hong Mei Zhang | 2003-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613199 | Apparatus and method for physical vapor deposition using an open top hollow cathode magnetron | Jeffrey Tobin, Jean Lu, Hong Mei Zhang | 2003-09-02 |