Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541400 | Process for CVD deposition of fluorinated silicon glass layer on semiconductor wafer | Harald te Nijenhuis | 2003-04-01 |
| 6524956 | Method for controlling the grain size of tungsten films | Jon Henri | 2003-02-25 |