Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665584 | Module classification approach for moving semiconductor wafers in a wafer processing system | Sofya B. Malitsky, Stanley P. Liu, Janet E. Yi | 2003-12-16 |
| 6560507 | Module classification approach for moving semiconductor wafers in a wafer processing system | Sofya B. Malitsky, Stanley P. Liu, Janet E. Yi | 2003-05-06 |