Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654108 | Test structure for metal CMP process control | Vladimir Machavariani, Amit Weingarten | 2003-11-25 |
| 6556947 | Optical measurements of patterned structures | David Scheiner | 2003-04-29 |