Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641948 | Fuel cells having silicon substrates and/or sol-gel derived support structures | Leroy Ohlsen, Aaron M. Cooke, Jonathan Mallari, Gordon Rice, Craig Nelson | 2003-11-04 |
| 6632324 | System for the plasma treatment of large area substrates | — | 2003-10-14 |
| 6514838 | Method for non mass selected ion implant profile control | — | 2003-02-04 |