Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661018 | Shroud nozzle for gas jet control in an extreme ultraviolet light source | Charles W. Clendening, Jr. | 2003-12-09 |
| 6657213 | High temperature EUV source nozzle | Rocco A. Orsini, Michael B. Petach | 2003-12-02 |