Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6523360 | Cooling cycle and control method thereof | Toshiharu Watanabe, Torahide Takahashi, Yoshihiro Sasaki, Kojiro Nakamura, Yasuhito Okawara | 2003-02-25 |
| 6506544 | Exposure method and exposure apparatus and mask | Kazuhiko Hori, Katsuya Machino, Manabu Toguchi | 2003-01-14 |