Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670391 | Benzopyran derivative and antiallergic agent | Hidetsugu Takagaki, Shingo Tanabe, Nobuyuki Kimura | 2003-12-30 |
| 6559928 | Substrate supporting apparatus, substrate transfer apparatus and the transfer method, method of holding the substrate, exposure apparatus and the method of manufacturing the apparatus | — | 2003-05-06 |