Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669810 | Method for detecting etching endpoint, and etching apparatus and etching system using the method thereof | Toshiya Miyazaki, Toshihiro Hayami, Tadao Nakatsuka, Hiroyuki Tanaka | 2003-12-30 |
| 6650522 | Semiconductor relay system and method for controlling the semiconductor relay system | Kenji Horibata, Teruyuki Nakayama, Takaaki Yamada, Yuji Hashimoto, Kazuhiro Harada | 2003-11-18 |
| 6645827 | Method for forming isolation regions on semiconductor device | — | 2003-11-11 |
| 6619385 | Cooling apparatus for cooling electric element | Michinori Watanabe, Michihiro Suzuki | 2003-09-16 |