SS

Shohei Suzuki

NI Nikon: 2 patents #50 of 325Top 20%
Overall (2003): #43,048 of 273,478Top 20%
2
Patents 2003

Issued Patents 2003

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6605398 Methods and apparatus for controlling beam blur in charged-particle-beam microlithography — 2003-08-12
6563125 Charged-particle-beam microlithography apparatus and methods for preventing coulomb effects using the hollow-beam technique — 2003-05-13